Welcome to MEMScyclopedia.org!
This website aims at proposing non-commercial documents for education, research and development in MicroElectroMechanical Systems (MEMS).
In general, although the documents are free to use, reuse or modify, their copyright is retained by the original authors and their use need to be acknowledged. Moreover the documents can not be used commercially without the copyright owner consent.
It is not a news site - but it welcomes the contribution of all particularly through the forum!
- Cleanroom Control Center
- A developping project for building a management system for cleanroom : machine booking, process request, projects, wafer tracking, consumable stock managing, etc...
- A (not so) short introduction to MEMS
- A one chapter description of MEMS technology that can be used by beginers or as course document for introductory MEMS class.
- The thick photoresist SU8
- A description of the properties and process for the SU8 photoresist. The photoresist allows achieve high aspect ratio polymer structures with standard mask aligner.